MASS-SPECTROMETRIC STUDY OF THE PYROLYSIS OF ORGANOMETALLIC PRECURSORS USABLE IN GAAS VAPOR-PHASE EPITAXY .2. THE DIARSINE ADDUCTS [C1ME2GAASET2]2CH2, [C1ET2GAASET2]2CH2

被引：8

作者：

MAURY, F

ELHAMMADI, A

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1988年 / 91卷 / 1-2期

关键词：

D O I：

10.1016/0022-0248(88)90373-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：105 / 110

页数：6

共 17 条

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[9] MOVPE OF GAAS FROM THE NEW ADDUCTS [CIME2GA.ASET2]2CH2, [CIET2GA.ASET2]2CH2 AND (C6F5)3-0,2ME0,2GA.ASET3 [J].

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