EFFECT OF MAGNETIC-FIELD AND BIAS POTENTIAL ON THE DISTRIBUTION OF PLASMA LUMINOSITY DURING RF SPUTTERING

被引：5

作者：

AUNER, G

HSIEH, YF

PADMANABHAN, KR

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.572113

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：275 / 278

页数：4

共 12 条

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