SURFACE STRUCTURAL DAMAGE PRODUCED IN INP(100) BY RF PLASMA OR SPUTTER DEPOSITION

被引：23

作者：

DAUTREMONTSMITH, WC

FELDMAN, LC

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(83)90209-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：187 / 196

页数：10

共 22 条

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