ANNIHILATION OF STACKING-FAULTS IN SILICON BY IMPURITY DIFFUSION

被引:33
作者
HASHIMOTO, H [1 ]
SHIBAYAMA, H [1 ]
MASAKI, H [1 ]
ISHIKAWA, H [1 ]
机构
[1] FUJITSU LABS LTD,NAKAHARA KU,KAWASAKI,JAPAN
关键词
D O I
10.1149/1.2132720
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1899 / 1902
页数:4
相关论文
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