TYPES OF OVAL DEFECTS ON GAAS GROWN BY MBE

被引:8
作者
LEE, CT
CHOU, YC
机构
关键词
D O I
10.1016/0022-0248(88)90383-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:169 / 172
页数:4
相关论文
共 11 条
[1]   MICROTWINNING AND GROWTH DEFECTS IN GAAS MBE LAYERS [J].
BAFLEUR, M ;
MUNOZYAGUE, A ;
ROCHER, A .
JOURNAL OF CRYSTAL GROWTH, 1982, 59 (03) :531-538
[2]   SOURCE AND ELIMINATION OF OVAL DEFECTS ON GAAS FILMS GROWN BY MOLECULAR-BEAM EPITAXY [J].
CHAI, YG ;
CHOW, R .
APPLIED PHYSICS LETTERS, 1981, 38 (10) :796-798
[3]  
Cho A. Y., 1975, Progress in Solid State Chemistry, V10, P157, DOI 10.1016/0079-6786(75)90005-9
[4]   IMPURITY PROFILES OF GAAS EPITAXIAL LAYERS DOPED WITH SN, SI, AND GE GROWN WITH MOLECULAR-BEAM EPITAXY [J].
CHO, AY .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (04) :1733-1735
[5]   INITIAL RESULTS OF A HIGH THROUGHPUT MBE SYSTEM FOR DEVICE FABRICATION [J].
HWANG, JCM ;
BRENNAN, TM ;
CHO, AY .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (02) :493-496
[6]   ORIGIN OF SURFACE-DEFECTS ON MOLECULAR-BEAM EPITAXIALLY GROWN GAAS [J].
ITO, T ;
SHINOHARA, M ;
IMAMURA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (08) :L524-L526
[7]   STRUCTURE-ANALYSIS OF OVAL DEFECT ON MOLECULAR-BEAM EPITAXIAL GAAS LAYER BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION [J].
KAKIBAYASHI, H ;
NAGATA, F ;
KATAYAMA, Y ;
SHIRAKI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (11) :L846-L848
[8]   AN INVESTIGATION OF GAAS FILMS GROWN BY MBE AT LOW SUBSTRATE TEMPERATURES AND GROWTH-RATES [J].
METZE, GM ;
CALAWA, AR ;
MAVROIDES, JG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (02) :166-169
[9]   HILLOCK DEFECTS IN INGAAS/INP MULTI-LAYERS GROWN BY MBE [J].
SAITO, H ;
BORLAND, JO ;
ASAHI, H ;
NAGAI, H ;
NAWATA, K .
JOURNAL OF CRYSTAL GROWTH, 1983, 64 (03) :521-528
[10]   SURFACE-DEFECTS ON MBE-GROWN GAAS [J].
SUZUKI, Y ;
SEKI, M ;
HORIKOSHI, Y ;
OKAMOTO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (02) :164-167