SCANNING ISOTHERMAL CURRENT TRANSIENT SPECTROSCOPY (SICTS) AND ITS APPLICATION TO THE MICROSCOPIC DISTRIBUTION MEASUREMENT OF GAP STATES IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：2

作者：

TOKUMARU, Y

OKUSHI, H

NAKA, H

机构：

[1] MICRON JAPAN CO LTD, TOKYO 180, JAPAN

[2] ELECTROTECH LAB, TSUKUBA, IBARAKI 305, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 06期

关键词：

D O I：

10.1143/JJAP.28.L1061

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1061 / L1064

页数：4

共 15 条

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