BURIED, ORDERED STRUCTURES - BORON IN SI(111) AND SI(100)

被引：18

作者：

HEADRICK, RL

WEIR, BE

LEVI, AFJ

EAGLESHAM, DJ

FELDMAN, LC

机构：

[1] AT and T Bell Laboratories, Murray Hill

来源：

JOURNAL OF CRYSTAL GROWTH | 1991年 / 111卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(91)91093-P

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

Two-dimensional, metastable, ordered structures have been prepared by deposition atop unique surface reconstructions. This discovery that surface superlattice structures can be buried in crystalline semiconductors suggests possibilities for ordered doping and ordered alloy structures with new electronic properties. In this paper we summarize our recent results in forming ordered structures of boron on Si(100) and Si(111) and the preservation of these structures under subsequent Si deposition.

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收藏

页码：838 / 842

页数：5

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