PHYSICAL-PROPERTIES OF SPUTTER-DEPOSITED TITANIUM SILICIDE AS A FUNCTION OF SUBSTRATE-TEMPERATURE

被引：5

作者：

TANIELIAN, M

BLACKSTONE, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 06期

关键词：

D O I：

10.1149/1.2114148

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1487 / 1491

页数：5

共 12 条

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