NISI2 ON SI(111) .1. EFFECTS OF SUBSTRATE CLEANING PROCEDURE AND RECONSTRUCTION

被引：10

作者：

AKINCI, G

OHNO, TR

WILLIAMS, ED

机构：

来源：

SURFACE SCIENCE | 1988年 / 193卷 / 03期

关键词：

D O I：

10.1016/0039-6028(88)90452-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：534 / 548

页数：15

共 42 条

[21] SCHOTTKY-BARRIER, ELECTRONIC STATES AND MICROSTRUCTURE AT NI SILICIDE-SILICON INTERFACES [J].

HO, PS ;

LIEHR, M ;

SCHMID, PE ;

LEGOUES, FK ;

YANG, ES ;

EVANS, HL ;

WU, X .

SURFACE SCIENCE, 1986, 168 (1-3) :184-192

[22] UHV-SEM OBSERVATIONS OF CLEANING PROCESS AND STEP FORMATION ON SILICON (111) SURFACES BY ANNEALING [J].

ISHIKAWA, Y ;

IKEDA, N ;

KENMOCHI, M ;

ICHINOKAWA, T .

SURFACE SCIENCE, 1985, 159 (01) :256-264

[23] LEED CRYSTALLOGRAPHY [J].

JONA, F .

JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1978, 11 (21) :4271-4306

[24] EPITAXIAL-GROWTH OF THE NICKEL DISILICIDE PHASE [J].

LAU, SS ;

CHEUNG, NW .

THIN SOLID FILMS, 1980, 71 (01) :117-127

[25] SCHOTTKY-BARRIER HEIGHTS OF EPITAXIAL NI-SILICIDES ON SI(111) [J].

LIEHR, M ;

SCHMID, PE ;

LEGOUES, FK ;

HO, PS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :855-859

[26] CORRELATION OF SCHOTTKY-BARRIER HEIGHT AND MICROSTRUCTURE IN THE EPITAXIAL NI SILICIDE ON SI(111) [J].

LIEHR, M ;

SCHMID, PE ;

LEGOUES, FK ;

HO, PS .

PHYSICAL REVIEW LETTERS, 1985, 54 (19) :2139-2142

[27] STRUCTURE AND ADSORPTION CHARACTERISTICS OF CLEAN SURFACES OF GERMANIUM AND SILICON [J].

SCHLIER, RE ;

FARNSWORTH, HE .

JOURNAL OF CHEMICAL PHYSICS, 1959, 30 (04) :917-926

[28] STRUCTURE-ANALYSIS OF SI(111)-7X7 RECONSTRUCTED SURFACE BY TRANSMISSION ELECTRON-DIFFRACTION [J].

TAKAYANAGI, K ;

TANISHIRO, Y ;

TAKAHASHI, S ;

TAKAHASHI, M .

SURFACE SCIENCE, 1985, 164 (2-3) :367-392

[29] FORMATION OF ULTRATHIN SINGLE-CRYSTAL SILICIDE FILMS ON SI - SURFACE AND INTERFACIAL STABILIZATION OF SI-NISI2 EPITAXIAL STRUCTURES [J].

TUNG, RT ;

GIBSON, JM ;

POATE, JM .

PHYSICAL REVIEW LETTERS, 1983, 50 (06) :429-432

[30] EPITAXIAL SILICIDES [J].

TUNG, RT ;

POATE, JM ;

BEAN, JC ;

GIBSON, JM ;

JACOBSON, DC .

THIN SOLID FILMS, 1982, 93 (1-2) :77-90

← 1 2 3 4 5 →