HOMOEPITAXIAL GROWTH OF COSI2 AND NISI2 ON (100) AND (110) SURFACES AT ROOM-TEMPERATURE

被引:39
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TUNG, RT
SCHREY, F
YALISOVE, SM
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10.1063/1.102338
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O59 [应用物理学];
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页码:2005 / 2007
页数:3
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共 21 条
[1]  
BAGLIN J, 1980, P S THIN FILM INTERF, V80, P341
[2]   CORELESS DEFECTS AND THE CONTINUITY OF EPITAXIAL NISI2/SI(100) THIN-FILMS [J].
BATSTONE, JL ;
GIBSON, JM ;
TUNG, RT ;
LEVI, AFJ .
APPLIED PHYSICS LETTERS, 1988, 52 (10) :828-830
[3]  
BATSTONE JL, 1987, MATER RES SOC S P, V82, P335
[4]   STRUCTURE AND NUCLEATION MECHANISM OF NICKEL SILICIDE ON SI(111) DERIVED FROM SURFACE EXTENDED-X-RAY-ABSORPTION FINE-STRUCTURE [J].
COMIN, F ;
ROWE, JE ;
CITRIN, PH .
PHYSICAL REVIEW LETTERS, 1983, 51 (26) :2402-2405
[5]   FORMATION OF THIN-FILMS OF COSI2 - NUCLEATION AND DIFFUSION MECHANISMS [J].
DHEURLE, FM ;
PETERSSON, CS .
THIN SOLID FILMS, 1985, 128 (3-4) :283-297
[6]  
EAGLESHAM DJ, UNPUB
[7]   LOW-TEMPERATURE SURFACE CLEANING OF SILICON AND ITS APPLICATION TO SILICON MBE [J].
ISHIZAKA, A ;
SHIRAKI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) :666-671
[8]   LOW-TEMPERATURE FORMATION OF NISI2 FROM EVAPORATED SILICON [J].
LIEN, CD ;
NICOLET, MA ;
LAU, SS .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 81 (01) :123-128
[9]   KINETICS OF COSI2 FROM EVAPORATED SILICON [J].
LIEN, CD ;
NICOLET, MA ;
LAU, SS .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (04) :249-251
[10]   EPITAXIAL REORDERING OF ION-IRRADIATED NISI2 LAYERS [J].
MAENPAA, M ;
HUNG, LS ;
NICOLET, MA ;
SADANA, DK ;
LAU, SS .
THIN SOLID FILMS, 1982, 87 (03) :277-284