PROCESS-CONTROL OF TITANIUM SILICIDE FORMATION USING RAPID THERMAL-PROCESSING

被引：4

作者：

KERMANI, A

DEBOLSKE, T

CROWLEY, J

STULTZ, T

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(87)90926-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：633 / 637

页数：5

共 18 条

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