OPTICAL AND ELECTRICAL-PROPERTIES OF THIN SILVER FILMS GROWN UNDER ION-BOMBARDMENT

被引:65
作者
PARMIGIANI, F [1 ]
KAY, E [1 ]
HUANG, TC [1 ]
PERRIN, J [1 ]
JURICH, M [1 ]
SWALEN, JD [1 ]
机构
[1] IBM CORP, ALMADEN RES CTR, SAN JOSE, CA 95120 USA
关键词
D O I
10.1103/PhysRevB.33.879
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:879 / 888
页数:10
相关论文
共 59 条
[51]  
WEAST RC, 1977, HDB CHEM PHYSICS, pF167
[52]  
Weaver J. H., 1981, OPTICAL PROPERTIES 2
[53]   PROPOSED MODEL FOR COMPOSITION OF SPUTTERED MULTICOMPONENT THIN FILMS [J].
WINTERS, HF ;
RAIMONDI, DL ;
HORNE, DE .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (07) :2996-&
[54]   GAS-ANALYSIS IN FILMS BY LASER-INDUCED FLASH EVAPORATION FOLLOWED BY MASS-SPECTROMETRY [J].
WINTERS, HF ;
KAY, E .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (03) :789-&
[55]   GAS INCORPORATION INTO SPUTTERED FILMS [J].
WINTERS, HF ;
KAY, E .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (10) :3928-&
[56]   THERMALLY INDUCED STRAINS IN CUBIC METAL FILMS [J].
WITT, F ;
VOOK, RW .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2773-&
[57]   MODEL OF BIAS SPUTTERING IN A DC-TRIODE CONFIGURATION APPLIED TO THE PRODUCTION OF PD FILMS [J].
ZIEMANN, P ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :828-832
[58]   CORRELATION BETWEEN THE ION-BOMBARDMENT DURING FILM GROWTH OF PD FILMS AND THEIR STRUCTURAL AND ELECTRICAL-PROPERTIES [J].
ZIEMANN, P ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :512-516
[59]  
ZIMAN JM, 1969, PHYSICS METAL, P264