THIN CUXS SPUTTERED FILMS IN AR/H2 ATMOSPHERES

被引：9

作者：

IBORRA, E

SANTAMARIA, J

MARTIL, I

GONZALEZDIAZ, G

SANCHEZQUESADA, F

机构：

来源：

VACUUM | 1987年 / 37卷 / 5-6期

关键词：

D O I：

10.1016/0042-207X(87)90329-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：437 / 439

页数：3

共 9 条

[1]

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[2]

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[4]

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[5] STRUCTURAL, ELECTRICAL AND OPTICAL-PROPERTIES OF CUXS LAYERS PRODUCED BY REACTIVE RF SPUTTERING [J].

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THIN SOLID FILMS, 1979, 59 (01) :13-24

[6] SPUTTERING PROCESS OF CU2S IN AN AR ATMOSPHERE [J].

SANTAMARIA, J ;

IBORRA, E ;

MARTIL, I ;

GONZALEZDIAZ, G ;

SANCHEZQUESADA, F .

VACUUM, 1987, 37 (5-6) :433-436

[7] BOMBARDMENT WITH ENERGETIC HYDROGEN-ATOMS DURING THE SPUTTER DEPOSITION OF AMORPHOUS HYDROGENATED SILICON [J].

TARDY, J ;

MEAUDRE, R .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 49 (01) :73-81

[8] REACTIVE SPUTTERING OF THIN CU2S FILMS FOR APPLICATION IN SOLAR-CELLS [J].

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BURGELMAN, M .

THIN SOLID FILMS, 1984, 112 (02) :97-106

[9] ANALYSIS OF SPUTTERING DISCHARGE BY OPTICAL AND MASS-SPECTROMETRY .1. PLATINUM AND TANTALUM SPUTTERED IN ARGON [J].

WESTWOOD, WD ;

BOYNTON, RJ .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) :2610-2618

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