ASSESSMENT OF THE RELATIVE CONTRIBUTION OF ATOMIC MIXING AND SELECTIVE SPUTTERING TO BEAM INDUCED BROADENING IN SIMS DEPTH PROFILING

被引：24

作者：

WITTMAACK, K

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90463-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：750 / 754

页数：5

共 15 条

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