A HYDROGEN FIELD-ION SOURCE WITH FOCUSING OPTICS

被引：7

作者：

LEWIS, GN ^{[1
]}

PAIK, H ^{[1
]}

MIODUSZEWSKI, J ^{[1
]}

SIEGEL, BM ^{[1
]}

机构：

[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期

关键词：

D O I：

10.1116/1.583360

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：116 / 119

页数：4

共 21 条

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[8] ENERGY SPREADING IN THE HYDROGEN FIELD-IONIZATION SOURCE [J].

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[9] EFFECT OF RECOIL ATOMS ON RESOLUTION IN ION-BEAM LITHOGRAPHY [J].

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[10]

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