THE DEPOSITION OF HIGHLY SUPERSATURATED METASTABLE ALUMINUM-MAGNESIUM ALLOYS BY UNBALANCED MAGNETRON SPUTTERING FROM COMPOSITE TARGETS

被引:40
作者
ARNELL, RD
BATES, RI
机构
[1] Department of Aeronautical and Mechanical Engineering, University of Salford, Salford
关键词
D O I
10.1016/0042-207X(92)90193-Z
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Aluminium-magnesium alloy coatings over the full composition range have been obtained by unbalanced magnetron sputtering from composite targets. Highly supersaturated single phase solid solutions have been formed over the ranges 0-20% magnesium in aluminium and 0-30% aluminium in magnesium. In the approximate range 45-50% magnesium a single phase amorphous or micro-crystalline glassy metal is formed, and at intermediate compositions the alloys consist of mixtures of the glassy phase and the appropriate solid solution. All the coatings have dense, non-columnar structures and are much harder than conventional alloys, having hardnesses up to 4400 MPa.
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页码:105 / 109
页数:5
相关论文
共 10 条
[1]  
ARNELL RD, 1989, 11TH P INT VAC C KOL
[2]   THE FORMATION AND CONTROL OF DIRECT-CURRENT MAGNETRON DISCHARGES FOR THE HIGH-RATE REACTIVE PROCESSING OF THIN-FILMS [J].
HOWSON, RP ;
SPENCER, AG ;
OKA, K ;
LEWIN, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :1230-1234
[3]  
KADLEC S, 1989, P ICMC SAN DIEGO
[4]   NOVEL PVD FILMS BY UNBALANCED MAGNETRON SPUTTERING [J].
MONAGHAN, D ;
ARNELL, RD .
VACUUM, 1992, 43 (1-2) :77-81
[5]  
MONAGHAN D, 1991, IN PRESS THIN SOLID
[6]   ION-BEAM BOMBARDMENT EFFECTS DURING FILM DEPOSITION [J].
ROSSNAGEL, SM ;
CUOMO, JJ .
VACUUM, 1988, 38 (02) :73-81
[7]   A MAGNETRON SPUTTER ION PLATING SYSTEM [J].
TEER, DG .
SURFACE & COATINGS TECHNOLOGY, 1988, 36 (3-4) :901-907
[8]   CHARGED-PARTICLE FLUXES FROM PLANAR MAGNETRON SPUTTERING SOURCES [J].
WINDOW, B ;
SAVVIDES, N .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (02) :196-202
[9]   UNBALANCED DC MAGNETRONS AS SOURCES OF HIGH ION FLUXES [J].
WINDOW, B ;
SAVVIDES, N .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :453-456
[10]  
WINDOW B, 1986, J VAC SCI TECHNOL A, V4, P504