共 13 条
[2]
STRATEGIES FOR SHALLOW JUNCTION AND PROFILE FORMATION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (01)
:289-295
[3]
Klepeis S.J., 1988, MAT RES SOC S P, V115, P179
[4]
KLEPEIS SJ, 1991, MATER RES SOC S P, V254, P121
[5]
2-DIMENSIONAL PN-JUNCTION DELINEATION ON CLEAVED SILICON SAMPLES WITH AN ULTRAHIGH-VACUUM SCANNING TUNNELING MICROSCOPE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (01)
:496-501
[8]
DOPANT PROFILE EXTRACTION FROM SPREADING RESISTANCE MEASUREMENTS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (01)
:421-425
[9]
ROWE WJ, 1986, 1986 P INT S TEST FA, P95