THE EFFECT OF SHEET RESISTANCE MODIFICATIONS UNDERNEATH THE CONTACT ON THE EXTRACTION OF THE CONTACT RESISTIVITY - APPLICATION TO THE CROSS KELVIN RESISTOR

被引：13

作者：

SCORZONI, A

FINETTI, M

机构：

[1] CNR, Bologna, Italy, CNR, Bologna, Italy

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 03期

关键词：

ELECTRIC CONDUCTIVITY - Contacts;

D O I：

10.1109/16.2466

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The influence of sheet-resistance modifications underneath the contact on the extraction of the contact resistivity is investigated. A generalized scaling theory has been applied to the modeling of the cross Kelvin resistor. It is shown that the errors associated with the contact sheet resistance modification could become appreciable in low-resistance metallizations of interest in VLSI.

引用

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页码：386 / 388

页数：3

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