AMORPHOUS SINX-H FILMS WITH A LOW-DENSITY OF SI-H BONDS

被引:29
作者
HASEGAWA, S
MATUURA, M
ANBUTU, H
KURATA, Y
机构
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1987年 / 56卷 / 05期
关键词
D O I
10.1080/13642818708220168
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:633 / 640
页数:8
相关论文
共 28 条
[1]  
ADAMS AC, 1983, SOLID STATE TECHNOL, V26, P135
[2]   2-PHASE STRUCTURE OF A-SI1-XNX-H FABRICATED BY MICROWAVE GLOW-DISCHARGE TECHNIQUE [J].
CHAYAHARA, A ;
UEDA, M ;
HAMASAKI, T ;
OSAKA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (01) :19-23
[3]   HYDROGEN CONTENT OF A VARIETY OF PLASMA-DEPOSITED SILICON NITRIDES [J].
CHOW, R ;
LANFORD, WA ;
WANG, KM ;
ROSLER, RS .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) :5630-5633
[4]   DANGLING BONDS IN MEMORY-QUALITY SILICON-NITRIDE FILMS [J].
FUJITA, S ;
SASAKI, A .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (02) :398-402
[5]  
Fujita S., 1984, International Electron Devices Meeting. Technical Digest (Cat. No. 84CH2099-0), P630
[6]   ELECTRON-SPIN-RESONANCE AND ELECTRICAL-PROPERTIES OF P-DOPED MICROCRYSTALLINE SI [J].
HASEGAWA, S ;
NARIKAWA, S ;
KURATA, Y .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1983, 48 (05) :431-447
[7]   AMORPHOUS SIN-H DIELECTRICS WITH LOW-DENSITY OF DEFECTS [J].
HASEGAWA, S ;
MATUURA, M ;
KURATA, Y .
APPLIED PHYSICS LETTERS, 1986, 49 (19) :1272-1274
[8]   BONDING AND ELECTRONIC-STRUCTURES OF AMORPHOUS SINX-H [J].
HASEGAWA, S ;
TSUKAO, T ;
ZALM, PC .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :2916-2920
[9]   PROPERTIES OF AMORPHOUS SEMICONDUCTING A-SI-H/A-SINX-H MULTILAYER FILMS AND OF A-SINX-H ALLOYS [J].
IBARAKI, N ;
FRITZSCHE, H .
PHYSICAL REVIEW B, 1984, 30 (10) :5791-5799
[10]   HYDROGEN-RELATED MEMORY TRAPS IN THIN SILICON-NITRIDE FILMS [J].
KAPOOR, VJ ;
BAILEY, RS ;
STEIN, HJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :600-607