DANGLING BONDS IN MEMORY-QUALITY SILICON-NITRIDE FILMS

被引：130

作者：

FUJITA, S

SASAKI, A

机构：

[1] Kyoto Univ, Dep of Electrical, Engineering, Kyoto, Jpn, Kyoto Univ, Dep of Electrical Engineering, Kyoto, Jpn

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 02期

关键词：

D O I：

10.1149/1.2113850

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

37

引用

收藏

页码：398 / 402

页数：5

相关论文

共 36 条

[1] DENSITY OF STATES IN GAP OF TETRAHEDRALLY BONDED AMORPHOUS-SEMICONDUCTORS
ADLER, D
[J]. PHYSICAL REVIEW LETTERS, 1978, 41 (25) : 1755 - 1758
[2] MODEL FOR ELECTRONIC-STRUCTURE OF AMORPHOUS-SEMICONDUCTORS
ANDERSON, PW
[J]. PHYSICAL REVIEW LETTERS, 1975, 34 (15) : 953 - 955
[3] SILICON-NITRIDE TRAP PROPERTIES AS REVEALED BY CHARGE-CENTROID MEASUREMENTS ON MNOS DEVICES
ARNETT, PC
YUN, BH
[J]. APPLIED PHYSICS LETTERS, 1975, 26 (03) : 94 - 96
[4] VARIATION IN THE STOICHIOMETRY OF THIN SILICON-NITRIDE INSULATING FILMS ON SILICON AND ITS CORRELATION WITH MEMORY TRAPS
BAILEY, RS
KAPOOR, VJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 484 - 487
[5] ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE
BRODSKY, MH
TITLE, RS
[J]. PHYSICAL REVIEW LETTERS, 1969, 23 (11) : 581 - &
[6] NONVOLATILE SEMICONDUCTOR MEMORY DEVICES
CHANG, JJ
[J]. PROCEEDINGS OF THE IEEE, 1976, 64 (07) : 1039 - 1059
[7] THRESHOLD-ALTERABLE SI-GATE MOS DEVICES
CHEN, PCY
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (05) : 584 - 586
[8] DEFECT STATES IN AMORPHOUS SILICON
ELLIOTT, SR
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1978, 38 (04): : 325 - 334
[9] DEEP TRAP STATES IN SI3N4 LAYER ON SI SUBSTRATE
FUJITA, S
NISHIHARA, M
HOI, WL
SASAKI, A
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (05) : 917 - 923
[10] VARIATIONS OF TRAP STATES AND DANGLING BONDS IN CVD-SI3N4 LAYER ON SI SUBSTRATE BY NH3/SIH4 RATIO
FUJITA, S
TOYOSHIMA, H
NISHIHARA, M
SASAKI, A
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (04) : 795 - 812

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