SUCCESSFUL OPERATION OF A SCANNING ION-MICROSCOPE WITH QUADRUPOLE MASS FILTER

被引：32

作者：

WITTMAACK, K ^{[1
]}

机构：

[1] GESELL STRAHLEN & UMWELT FORSCH MBH,PHYS TECH ABT,D-8042 NEUHERBERG,FED REP GER

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1976年 / 47卷 / 01期

关键词：

D O I：

10.1063/1.1134472

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：157 / 158

页数：2

共 13 条

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[8] ANALYSIS OF SURFACES UTILIZING SPUTTER ION SOURCE INSTRUMENTS [J].

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[9] SIMS WITH A STANDARD QUADRUPOLE RESIDUAL GAS ANALYZER [J].

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