SILICIDE SILICON INTERFACE BONDING

被引:2
作者
RUBLOFF, GW
机构
关键词
D O I
10.1016/0304-3991(84)90114-1
中图分类号
TH742 [显微镜];
学科分类号
摘要
引用
收藏
页码:107 / 119
页数:13
相关论文
共 53 条
[31]  
PURTELL RJ, COMMUNICATION
[32]   SI(111)-PT INTERFACE AT ROOM-TEMPERATURE - A SYNCHROTRON RADIATION PHOTOEMISSION-STUDY [J].
ROSSI, G ;
ABBATI, I ;
BRAICOVICH, L ;
LINDAU, I ;
SPICER, WE .
PHYSICAL REVIEW B, 1982, 25 (06) :3627-3636
[33]   MICROSCOPIC PROPERTIES AND BEHAVIOR OF METAL-SEMICONDUCTOR INTERFACES [J].
RUBLOFF, GW .
FESTKORPERPROBLEME-ADVANCES IN SOLID STATE PHYICS, 1983, 23 :179-206
[34]   INTERFACE STATES AT THE PT SILICIDE-SI INTERFACE [J].
RUBLOFF, GW .
PHYSICAL REVIEW B, 1982, 25 (06) :4307-4309
[35]   CHEMICAL BONDING AND REACTIONS AT THE PD-SI INTERFACE [J].
RUBLOFF, GW ;
HO, PS ;
FREEOUF, JF ;
LEWIS, JE .
PHYSICAL REVIEW B, 1981, 23 (08) :4183-4196
[36]   MICROSCOPIC PROPERTIES AND BEHAVIOR OF SILICIDE INTERFACES [J].
RUBLOFF, GW .
SURFACE SCIENCE, 1983, 132 (1-3) :268-314
[37]  
RUBLOFF GW, 1980, 8TH P INT VAC C CANN, V1, P562
[38]  
SANKEY OF, SOLID STATE COMMUN
[39]   THEORETICAL-MODELS OF SCHOTTKY BARRIERS [J].
SCHLUTER, M .
THIN SOLID FILMS, 1982, 93 (1-2) :3-19
[40]   ELECTRONIC STATES AND ATOMIC-STRUCTURE AT THE PD2SI-SI INTERFACE [J].
SCHMID, PE ;
HO, PS ;
FOLL, H ;
RUBLOFF, GW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (03) :937-943