LIMITS OF DEPTH RESOLUTION FOR SPUTTER SECTIONING - A SECONDARY ION MASS-SPECTROMETRY INVESTIGATION OF NI-63 IN NICKEL

被引：37

作者：

MACHT, MP

WILLECKE, R

NAUNDORF, V

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 43卷 / 04期

关键词：

D O I：

10.1016/0168-583X(89)90398-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：507 / 512

页数：6

共 14 条

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[8] DIRECT MEASUREMENT OF SMALL DIFFUSION-COEFFICIENTS WITH SECONDARY ION MASS-SPECTROSCOPY [J].

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[9] DEPTH RESOLUTION IN SIMS - EXPERIMENTAL INVESTIGATION OF NI AND IN IN CU [J].

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