CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE STUDY OF RESIDUAL DEFECTS IN BF2+-IMPLANTED (001)SI

被引：36

作者：

NIEH, CW

CHEN, LJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 09期

关键词：

D O I：

10.1063/1.337722

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3114 / 3119

页数：6

共 27 条

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