SOFT-X-RAY PROJECTION IMAGING WITH A 1/1 RING-FIELD OPTIC

被引：7

作者：

MACDOWELL, AA

BJORKHOLM, JE

EARLY, K

FREEMAN, RR

HIMEL, MD

MULGREW, PP

SZETO, LH

TAYLOR, DW

TENNANT, DM

WOOD, OR

BOKOR, J

EICHNER, L

JEWELL, TE

WASKIEWICZ, WK

WHITE, DL

WINDT, DL

DSOUZA, RM

SILFVAST, WT

ZERNIKE, F

机构：

[1] AT&T BELL LABS, HOLMDEL, NJ 07733 USA

[2] AT&T BELL LABS, MURRAY HILL, NJ 07974 USA

[3] UNIV CENT FLORIDA, ORLANDO, FL 32826 USA

[4] SVG LITHOG SYST INC, WILTON, CT 06897 USA

[5] MIT, DEPT PHYS, CAMBRIDGE, MA 02139 USA

来源：

APPLIED OPTICS | 1993年 / 32卷 / 34期

关键词：

D O I：

10.1364/AO.32.007072

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-mum features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 mum, probably because of the presence of substrate figuring errors.

引用

页码：7072 / 7078

页数：7

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