A CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY STUDY OF SILICIDE GROWTH-KINETICS IN THE CR/(100)SI SYSTEM AT 425-DEGREES-C

被引：16

作者：

NATAN, M

DUNCAN, SW

BYER, NE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 06期

关键词：

D O I：

10.1063/1.333399

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1450 / 1452

页数：3

共 12 条

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