IMPURITY EFFECTS IN MOLYBDENUM SILICIDE FORMATION

被引：28

作者：

NAVA, F

MAJNI, G

CANTONI, P

PIGNATEL, G

FERLA, G

CAPPELLETTI, P

MORI, F

机构：

[1] IST NAZL FIS NUCL,BOLOGNA,ITALY

[2] SGS,MILANO,ITALY

来源：

THIN SOLID FILMS | 1982年 / 94卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90030-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：59 / 65

页数：7

共 19 条

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