PHOSPHORUS DIFFUSION USING SPIN-ON PHOSPHOSILICATE-GLASS SOURCE AND HALOGEN LAMPS

被引：11

作者：

KATO, J

ONO, Y

机构：

[1] Suwa Seikosha Co, Fujimi Plant,, Fujimi-Machi, Jpn, Suwa Seikosha Co, Fujimi Plant, Fujimi-Machi, Jpn

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 07期

关键词：

D O I：

10.1149/1.2114201

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1730 / 1732

页数：3

共 16 条

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[9] METASTABLE AS-CONCENTRATIONS IN SI ACHIEVED BY ION-IMPLANTATION AND RAPID THERMAL ANNEALING [J].

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