HEAT-TREATMENT OF BULK GALLIUM-ARSENIDE USING A PHOSPHOSILICATE GLASS CAP

被引:5
作者
MATHUR, G [1 ]
WHEATON, ML [1 ]
BORREGO, JM [1 ]
GHANDHI, SK [1 ]
机构
[1] RENSSELAER POLYTECH INST,DEPT SYST ENGN,TROY,NY 12181
关键词
D O I
10.1063/1.335332
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:4711 / 4714
页数:4
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