BILAYER SILICIDE FORMATION DURING THE INTERACTION OF THIN CHROMIUM, NICKEL AND PLATINUM FILMS WITH SILICON

被引：7

作者：

NAUDE, MO ^{[1
]}

PRETORIUS, R ^{[1
]}

MARAIS, DJ ^{[1
]}

机构：

[1] UNIV STELLENBOSCH,DEPT PHYS,DIV SOLID STATE,STELLENBOSCH 7600,SOUTH AFRICA

来源：

THIN SOLID FILMS | 1982年 / 89卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90306-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：339 / 348

页数：10

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