RECENT DEVELOPMENTS IN SILICON MOLECULAR-BEAM EPITAXY

[1] LOW BARRIER HEIGHT SCHOTTKY MIXER DIODE USING SUPER THIN SILICON FILMS BY MOLECULAR-BEAM EPITAXY [J]. APPLIED PHYSICS LETTERS, 1981, 39 (08) : 629 - 630

[2] SILICON METAL SILICIDE HETEROSTRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY [J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 643 - 646

[3] PATTERNED SILICON MOLECULAR-BEAM EPITAXY WITH SUB-MICRON LATERAL RESOLUTION [J]. APPLIED PHYSICS LETTERS, 1982, 41 (08) : 752 - 755

[4] SILICON MBE APPARATUS FOR UNIFORM HIGH-RATE DEPOSITION ON STANDARD FORMAT WAFERS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02): : 137 - 142

[5] DEPENDENCE OF RESIDUAL DAMAGE ON TEMPERATURE DURING AR+ SPUTTER CLEANING OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) : 907 - 913

[6] BEAN JC, 1981, 1981 INT EL DEV M, P6

[7] BEAN JC, 1981, IMPURITY DOPING PROC, pCH4

[8] BEAN JC, UNPUB

[9] BEAN JC, 1982, P INT M RELATIONSHIP

[10] ACCEPTOR DOPANTS IN SILICON MOLECULAR-BEAM EPITAXY [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3395 - 3399

[1] LOW BARRIER HEIGHT SCHOTTKY MIXER DIODE USING SUPER THIN SILICON FILMS BY MOLECULAR-BEAM EPITAXY [J]. APPLIED PHYSICS LETTERS, 1981, 39 (08) : 629 - 630

[2] SILICON METAL SILICIDE HETEROSTRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY [J]. APPLIED PHYSICS LETTERS, 1980, 37 (07) : 643 - 646

[3] PATTERNED SILICON MOLECULAR-BEAM EPITAXY WITH SUB-MICRON LATERAL RESOLUTION [J]. APPLIED PHYSICS LETTERS, 1982, 41 (08) : 752 - 755

[4] SILICON MBE APPARATUS FOR UNIFORM HIGH-RATE DEPOSITION ON STANDARD FORMAT WAFERS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02): : 137 - 142

[5] DEPENDENCE OF RESIDUAL DAMAGE ON TEMPERATURE DURING AR+ SPUTTER CLEANING OF SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) : 907 - 913

[6] BEAN JC, 1981, 1981 INT EL DEV M, P6

[7] BEAN JC, 1981, IMPURITY DOPING PROC, pCH4

[8] BEAN JC, UNPUB

[9] BEAN JC, 1982, P INT M RELATIONSHIP

[10] ACCEPTOR DOPANTS IN SILICON MOLECULAR-BEAM EPITAXY [J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3395 - 3399