SELF-INTERSTITIAL AND VACANCY CONTRIBUTIONS TO SILICON SELF-DIFFUSION DETERMINED FROM THE DIFFUSION OF GOLD IN SILICON

被引:53
作者
MOREHEAD, F [1 ]
STOLWIJK, NA [1 ]
MEYBERG, W [1 ]
GOSELE, U [1 ]
机构
[1] MAX PLANCK INST MET RES,INST PHYS,D-7000 STUTTGART 80,FED REP GER
关键词
D O I
10.1063/1.94074
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:690 / 692
页数:3
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