OSCILLATING-ANALYZER ELLIPSOMETER

被引：21

作者：

AZZAM, RMA

机构：

[1] UNIV NEBRASKA,COLL MED,DIV HEMATOL,OMAHA,NB 68105

[2] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NB 68508

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1976年 / 47卷 / 05期

关键词：

D O I：

10.1063/1.1134702

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：624 / 628

页数：5

共 26 条

[1]

Abramowitz M., 1965, HDB MATH FUNCTIONS

[2]

Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6

[3] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) :639-646

[4] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

APPLIED OPTICS, 1975, 14 (01) :220-228

[5] GEOMETRICALLY EXACT ELLIPSOMETER ALIGNMENT [J].

ASPNES, DE ;

STUDNA, AA .

APPLIED OPTICS, 1971, 10 (05) :1024-&

[6] CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (05) :700-&

[7] ELLIPSOMETRIC MEASUREMENT OF POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (03) :336-&

[8] ANALYSIS OF SYSTEMATIC-ERRORS IN ROTATING-ANALYZER ELLIPSOMETERS [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (11) :1459-1469

[9] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[10] POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM AS A BILINEAR TRANSFORMATION [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (02) :222-&

← 1 2 3 →