TITANIUM-TUNGSTEN CONTACTS TO SILICON .2. STABILITY AGAINST ALUMINUM PENETRATION

被引：18

作者：

BABCOCK, SE

TU, KN

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 05期

关键词：

D O I：

10.1063/1.336470

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1599 / 1605

页数：7

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