EFFECT OF CHLORINE IMPLANTATION ON PHOSPHORUS PREDEPOSITION IN SILICON

被引:4
作者
SOLMI, S
ARMIGLIATO, A
GOVONI, D
LOTTI, R
NEGRINI, P
SERVIDORI, M
ZANI, A
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1985年 / 89卷 / 02期
关键词
D O I
10.1002/pssa.2210890214
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:533 / 539
页数:7
相关论文
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