BIAXIAL COMPRESSION IN GAAS THIN-FILMS GROWN ON SI

被引:12
作者
JOSHKIN, V
ORLIKOVSKY, A
OKTYABRSKY, S
DOVIDENKO, K
KVIT, A
MUHAMEDZANOV, I
PASHAEV, E
机构
[1] PN LEBEDEV PHYS INST,MOSCOW 117924,RUSSIA
[2] RUSSIAN ACAD SCI,INST CRISTALLOG,MOSCOW 117333,RUSSIA
关键词
D O I
10.1016/0022-0248(94)00620-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Using X-ray diffraction, transmission electron microscopy and low temperature photoluminescence, we investigated the interfacial strain accommodation of the MBE grown thin (0.3-2 mu m) films of GaAs on (001)Si substrates. When heavily As-doped Si buffer layers were used, the GaAs-on-Si films displayed biaxial compression rather than tension and smaller unit-cell volumes as compared with that expected from elastically compressed GaAs bulk single crystal. As a result of studying of the biaxial stress influence on the PL spectra of GaAs, we proposed a new identification of PL bands in GaAs-on-Si. The effect of rapid and slow thermal annealing is also investigated.
引用
收藏
页码:13 / 18
页数:6
相关论文
共 14 条
[1]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS AND OTHER COMPOUND SEMICONDUCTORS [J].
ADOMI, K ;
CHYI, JI ;
FANG, SF ;
SHEN, TC ;
STRITE, S ;
MORKOC, H .
THIN SOLID FILMS, 1991, 205 (02) :182-212
[2]   GALLIUM-ARSENIDE AND OTHER COMPOUND SEMICONDUCTORS ON SILICON [J].
FANG, SF ;
ADOMI, K ;
IYER, S ;
MORKOC, H ;
ZABEL, H ;
CHOI, C ;
OTSUKA, N .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) :R31-R58
[3]   THE STABILITY OF A DISLOCATION THREADING A STRAINED LAYER ON A SUBSTRATE [J].
FREUND, LB .
JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 1987, 54 (03) :553-557
[4]   ACCEPTOR EXCITED-STATES IN GALLIUM-ARSENIDE ON SILICON [J].
FREUNDLICH, A ;
NEU, G ;
GRENET, JC .
SOLID STATE COMMUNICATIONS, 1990, 76 (02) :87-92
[5]   LOW-TEMPERATURE GROWTH OF GAAS AND ALAS-GAAS QUANTUM-WELL LAYERS BY MODIFIED MOLECULAR-BEAM EPITAXY [J].
HORIKOSHI, Y ;
KAWASHIMA, M ;
YAMAGUCHI, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1986, 25 (10) :L868-L870
[6]   LOW-TEMPERATURE PREANNEALING FOR CARBON REMOVAL FROM SI SURFACE IN GAAS-ON-SI MOLECULAR-BEAM EPITAXIAL-GROWTH [J].
JOSHKIN, VA ;
OKTYABRSKY, SR ;
BOGONIN, IA ;
ORLIKOVSKY, AA .
JOURNAL OF CRYSTAL GROWTH, 1993, 132 (1-2) :209-214
[7]   CAPLESS RAPID THERMAL ANNEALING OF GAAS USING A GRAPHITE SUSCEPTOR [J].
KAZIOR, TE ;
BRIERLEY, SK ;
PIEKARSKI, FJ .
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1991, 4 (01) :21-25
[8]   SUBSTRATE ORIENTATION AND PROCESSING EFFECTS ON GAAS/SI MISORIENTATION IN GAAS-ON-SI GROWN BY MBE [J].
MATYI, RJ ;
LEE, JW ;
SCHAAKE, HF .
JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (01) :87-93
[9]   PHOTOLUMINESCENCE OF THE 78 MEV ACCEPTOR IN GAAS-LAYERS GROWN BY MOLECULAR-BEAM EPITAXY [J].
MIHARA, M ;
MANNOH, M ;
SHINOZAKI, K ;
NARITSUKA, S ;
ISHII, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (07) :L611-L613
[10]   MISORIENTATION IN GAAS ON SI GROWN BY MIGRATION-ENHANCED EPITAXY [J].
NOZAWA, K ;
HORIKOSHI, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1993, 32 (1B) :626-631