LASER GENERATED MICROSTRUCTURES

被引：75

作者：

RYTZFROIDEVAUX, Y

SALATHE, RP

GILGEN, HH

机构：

[1] TECH CTR, GENERALDIREKT PTT, CH-3030 BERN, SWITZERLAND

[2] COLUMBIA UNIV, DEPT ELECT ENGN, NEW YORK, NY 10028 USA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 37卷 / 03期

关键词：

D O I：

10.1007/BF00617497

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：121 / 138

页数：18

共 161 条

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JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) :1641-1643

[3] INFRARED LASER-INDUCED DESORPTION OF H2O AND HYDROCARBONS FROM OPTICAL-SURFACES [J].

ALLEN, SD ;

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APPLIED PHYSICS LETTERS, 1982, 41 (05) :416-418

[4] LASER CHEMICAL VAPOR-DEPOSITION - A TECHNIQUE FOR SELECTIVE AREA DEPOSITION [J].

ALLEN, SD .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) :6501-6505

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[6]

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ALSUFI, AK ;

EICHLER, HJ ;

SALK, J ;

RIEDEL, HJ .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3629-3631

[8] LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SI AND GE FILMS BY ULTRAVIOLET-LASER PHOTO-DISSOCIATION OF SILANE AND GERMANE [J].

ANDREATTA, RW ;

ABELE, CC ;

OSMUNDSEN, JF ;

EDEN, JG ;

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GREENE, JE .

APPLIED PHYSICS LETTERS, 1982, 40 (02) :183-185

[9] NONTHERMAL DESORPTION OF MOLECULAR-IONS OF POLYATOMIC-MOLECULES INDUCED BY UV LASER-RADIATION [J].

ANTONOV, VS ;

LETOKHOV, VS ;

SHIBANOV, AN .

APPLIED PHYSICS, 1981, 25 (01) :71-76

[10] EFFECT OF LASER-LIGHT ON THE STICKING COEFFICIENT IN ZNS THIN-FILM GROWTH [J].

ARNONE, C ;

DANEU, V ;

RIVASANSEVERINO, S .

APPLIED PHYSICS LETTERS, 1980, 37 (11) :1012-1013

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