LASER GENERATED MICROSTRUCTURES

被引：75

作者：

RYTZFROIDEVAUX, Y

SALATHE, RP

GILGEN, HH

机构：

[1] TECH CTR, GENERALDIREKT PTT, CH-3030 BERN, SWITZERLAND

[2] COLUMBIA UNIV, DEPT ELECT ENGN, NEW YORK, NY 10028 USA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 37卷 / 03期

关键词：

D O I：

10.1007/BF00617497

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：121 / 138

页数：18

共 161 条

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[93]

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PHYSICAL REVIEW LETTERS, 1980, 44 (24) :1604-1607

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[98] SURFACE ENHANCED RAMAN-SCATTERING [J].

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PHYSICS LETTERS A, 1980, 77 (05) :381-383

[99] WAFER-SCALE LASER PANTOGRAPHY .3. FABRICATION OF NORMAL-METAL-OXIDE-SEMICONDUCTOR TRANSISTORS AND SMALL-SCALE INTEGRATED-CIRCUITS BY DIRECT-WRITE LASER-INDUCED PYROLYTIC REACTIONS [J].

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APPLIED PHYSICS LETTERS, 1983, 43 (10) :946-948

[100] PHOTOELECTROCHEMICAL DEPOSITION OF MICROSCOPIC METAL-FILM PATTERNS ON SI AND GAAS [J].

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RAUH, RD .

APPLIED PHYSICS LETTERS, 1981, 39 (05) :418-420

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