COMPUTER ALGORITHM FOR ACCURATE AND REPEATABLE PROFILE ANALYSIS USING ANODIZATION AND STRIPPING OF SILICON

被引：27

作者：

PLUNKETT, JC

STONE, JL

LEU, A

机构：

[1] TEXAS A&M UNIV, DEPT ELECT ENGN, INST SOLID STATE ELECTR, COLLEGE STN, TX 77843 USA

[2] INST NACL ASTROFIS OPT & ELECTR, PUEBLA, MEXICO

来源：

关键词：

D O I：

10.1016/0038-1101(77)90139-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：447 / 453

页数：7

共 21 条

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