SIMULATION OF THE BULK AND SURFACE-PROPERTIES OF AMORPHOUS HYDROGENATED SILICON DEPOSITED FROM SILANE PLASMAS

被引：37

作者：

MCCAUGHEY, MJ

KUSHNER, MJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 01期

关键词：

D O I：

10.1063/1.342568

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：186 / 195

页数：10

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