INFRARED SPECTROSCOPIC CHARACTERIZATION OF SILICON-NITRIDE FILMS - OPTICAL DISPERSION INDUCED FREQUENCY-SHIFTS

被引：22

作者：

KNOLLE, WR

ALLARA, DL

机构：

[1] AT&T BELL LABS,BELL COMMUN RES,600 MT AVE,MURRAY HILL,NJ 07974

[2] AT&T BELL LABS,READING,PA 19603

来源：

APPLIED SPECTROSCOPY | 1986年 / 40卷 / 07期

关键词：

D O I：

10.1366/0003702864507855

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1046 / 1049

页数：4

共 11 条

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