DEPTH PROFILING BY SIMS DEPTH RESOLUTION, DYNAMIC-RANGE AND SENSITIVITY

被引：124

作者：

MAGEE, CW

HONIG, RE

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1982年 / 4卷 / 02期

关键词：

D O I：

10.1002/sia.740040202

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：35 / 41

页数：7

共 34 条

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