STABLE, HIGH QUANTUM EFFICIENCY, UV-ENHANCED SILICON PHOTODIODES BY ARSENIC DIFFUSION

被引:53
作者
KORDE, R [1 ]
GEIST, J [1 ]
机构
[1] NBS,GAITHERSBURG,MD 20899
关键词
DIFFUSED PHOTODIODE - LONG TERM STABILITY - QUANTUM EFFICIENCY - RESPONSIVITY - SILICON PHOTODIODES;
D O I
10.1016/0038-1101(87)90034-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
(Edited Abstract)
引用
收藏
页码:89 / 92
页数:4
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