THE PREPARATION AND CHARACTERIZATION OF OPTICAL THIN-FILMS PRODUCED BY ION-ASSISTED DEPOSITION

被引：26

作者：

MARTIN, PJ

NETTERFIELD, RP

SAINTY, WG

PACEY, CG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572735

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：341 / 345

页数：5

共 22 条

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[10] MODIFICATION OF THE OPTICAL AND STRUCTURAL-PROPERTIES OF DIELECTRIC ZRO2 FILMS BY ION-ASSISTED DEPOSITION [J].

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