CONTROL OF RESISTIVITY OF POLYCRYSTALLINE SI FILMS BY SOLID-PHASE RECRYSTALLIZATION (SPR)

被引：9

作者：

MIZUSHIMA, I

TABUCHI, W

KUWANO, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1988年 / 27卷 / 12期

关键词：

D O I：

10.1143/JJAP.27.2310

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2310 / 2314

页数：5

共 33 条

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