CONTROL OF RESISTIVITY OF POLYCRYSTALLINE SI FILMS BY SOLID-PHASE RECRYSTALLIZATION (SPR)

被引:9
作者
MIZUSHIMA, I
TABUCHI, W
KUWANO, H
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1988年 / 27卷 / 12期
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D O I
10.1143/JJAP.27.2310
中图分类号
O59 [应用物理学];
学科分类号
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页码:2310 / 2314
页数:5
相关论文
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