FOCUSED ION-BEAM MILLING

被引：23

作者：

WATKINS, REJ ^{[2
]}

ROCKETT, P

THOMS, S

CLAMPITT, R

SYMS, R

机构：

[1] UNIV OXFORD,RUTHERFORD APPLETON LAB,OXFORD,ENGLAND

[2] UNIV OXFORD,DEPT ENGN SCI,OXFORD,ENGLAND

[3] OXFORD APPL RES,WITNEY,OXON,ENGLAND

来源：

VACUUM | 1986年 / 36卷 / 11-12期

关键词：

D O I：

10.1016/0042-207X(86)90148-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：961 / 967

页数：7

共 22 条

[1] NOVEL METHOD FOR MEASURING INTENSITY DISTRIBUTION OF FOCUSED ION-BEAMS [J].

ARIMOTO, H ;

TAKAMORI, A ;

MIYAUCHI, E ;

HASHIMOTO, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1983, 22 (12) :L780-L782

[2] ADVANCES IN MOLTEN-METAL FIELD-ION SOURCES [J].

CLAMPITT, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01) :111-116

[3] A 100-KV ION PROBE MICROFABRICATION SYSTEM WITH A TETRODE GUN [J].

CLEAVER, JRA ;

AHMED, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1145-1148

[4] ION-BEAM EXPOSURE APPARATUS USING A LIQUID-METAL SOURCE [J].

KOMURO, M .

THIN SOLID FILMS, 1982, 92 (1-2) :155-164

[5] MEASUREMENT OF VIRTUAL CROSSOVER IN LIQUID GALLIUM ION-SOURCE [J].

KOMURO, M ;

KANAYAMA, T ;

HIROSHIMA, H ;

TANOUE, H .

APPLIED PHYSICS LETTERS, 1983, 42 (10) :908-910

[6] FIELD-EMISSION LIQUID-METAL ION-SOURCE AND TRIODE ION GUN [J].

KOMURO, M ;

KAWAKATSU, H .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2642-2645

[7] FET FABRICATION USING MASKLESS ION-IMPLANTATION [J].

KUBENA, RL ;

ANDERSON, CL ;

SELIGER, RL ;

JULLENS, RA ;

STEVENS, EH ;

LAGNADO, I .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :916-920

[8] HIGH-RESOLUTION SPUTTERING USING A FOCUSED ION-BEAM [J].

KUBENA, RL ;

SELIGER, RL ;

STEVENS, EH .

THIN SOLID FILMS, 1982, 92 (1-2) :165-169

[9] ANALYSIS OF ACCELERATING LENS SYSTEM IN FIELD-EMISSION SCANNING ELECTRON-MICROSCOPE [J].

KURODA, K ;

SUZUKI, T .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (03) :1436-1441

[10] ION CHANNELING EFFECTS IN SCANNING ION MICROSCOPY WITH A 60 KEV GA+ PROBE [J].

LEVISETTI, R ;

FOX, TR ;

LAM, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 205 (1-2) :299-309

← 1 2 3 →