共 10 条
[3]
FAIR RB, 1990, J ELECTROCHEM SOC, V137, P447
[4]
A SYSTEMATIC ANALYSIS OF DEFECTS IN ION-IMPLANTED SILICON
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1988, 45 (01)
:1-34
[5]
LOW ME, 1988, IEEE T COMPUT AID D, V7, P181
[8]
SEDWICK TO, 1988, J APPL PHYS, V63, P1452
[9]
VANDERVORST W, 1990, J ELECTROCHEM SOC, V137, P769