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ELECTRON-CYCLOTRON RESONANCE PLASMAS EXCITED BY RECTANGULAR AND CIRCULAR MICROWAVE MODES
被引:30
作者
:
POPOV, OA
论文数:
0
引用数:
0
h-index:
0
机构:
Microscience, Inc., Norwell, Massachusetts
POPOV, OA
机构
:
[1]
Microscience, Inc., Norwell, Massachusetts
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
|
1990年
/ 8卷
/ 03期
关键词
:
D O I
:
10.1116/1.576648
中图分类号
:
TB3 [工程材料学];
学科分类号
:
0805 ;
080502 ;
摘要
:
Microwave plasmas were excited and studied in cylindrical chambers with inner diameters of 5–15 cm in the presence of the static axial magnetic fields of 800–1200 G. Rectangular (TE10) and circular (TM01) modes of electromagnetic waves at a frequency of 2.45 GHz were introduced into the plasma chamber via a dielectric vacuum window. It was found that a transition to the high level of microwave power absorption occurred when the plasma density reached a value of Ncr— 7.4X1010cm−3 and magnetic field was about 875 G. Hysteresis in the dependences of reflected microwave power, Prversus incident microwave power, Pi, and gas pressure were observed. Tvyo “resonant” magnetic fields which provided the highest plasma densities in electron cyclotron resonance (ECR) plasma were found: 875 and 920–930 G. Both column- and donut-type high density (Ne~ 1012cm−3) ECR plasmas were achieved in 15 cm diam chamber utilizing rectangular TE10 and circular TM01modes. © 1990, American Vacuum Society. All rights reserved.
引用
收藏
页码:2909 / 2912
页数:4
相关论文
共 28 条
[21]
MEASUREMENT OF POWER TRANSFER EFFICIENCY FROM MICROWAVE FIELD TO PLASMA UNDER ECR CONDITION
[J].
SAKAMOTO, Y
论文数:
0
引用数:
0
h-index:
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机构:
INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN
INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN
SAKAMOTO, Y
.
JAPANESE JOURNAL OF APPLIED PHYSICS,
1977,
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HIGH-CURRENT ION IMPLANTER USING A MICROWAVE ION-SOURCE
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SAKUDO, N
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0
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KANOMATA, I
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0
KANOMATA, I
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REVIEW OF SCIENTIFIC INSTRUMENTS,
1983,
54
(06)
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[23]
MICROWAVE ION-SOURCE FOR HIGH-CURRENT IMPLANTER
[J].
SAKUDO, N
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0
引用数:
0
h-index:
0
SAKUDO, N
;
TOKIGUCHI, K
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0
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TOKIGUCHI, K
;
KOIKE, H
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KOIKE, H
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KANOMATA, I
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0
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0
KANOMATA, I
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
1978,
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MICROWAVE ION-SOURCE
[J].
SAKUDO, N
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0
引用数:
0
h-index:
0
机构:
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
SAKUDO, N
;
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0
h-index:
0
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HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
TOKIGUCHI, K
;
KOIKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
KOIKE, H
;
KANOMATA, I
论文数:
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0
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HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
KANOMATA, I
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
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48
(07)
:762
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[25]
BEAM EXTRACTION EXPERIMENTS FROM MICROWAVE ION SOURCES
[J].
TOKIGUCHI, K
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0
TOKIGUCHI, K
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SAKUDO, N
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KOIKE, H
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KOIKE, H
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57
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:1526
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[26]
VERY HIGH-CURRENT ECR ION-SOURCE FOR AN OXYGEN ION IMPLANTER
[J].
TORII, Y
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TORII, Y
;
SHIMADA, M
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SHIMADA, M
;
WATANABE, I
论文数:
0
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WATANABE, I
.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
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(2-4)
:178
-181
[27]
TRAVELPIECE AW, 1959, J APPL PHYS, V30, P1784
[28]
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[J].
TULLE, PA
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MONTREAL,DEPT PHYS,CP6128,MONTREAL,QUEBEC,CANADA
UNIV MONTREAL,DEPT PHYS,CP6128,MONTREAL,QUEBEC,CANADA
TULLE, PA
.
PLASMA PHYSICS AND CONTROLLED FUSION,
1974,
16
(10)
:933
-945
←
1
2
3
→
共 28 条
[21]
MEASUREMENT OF POWER TRANSFER EFFICIENCY FROM MICROWAVE FIELD TO PLASMA UNDER ECR CONDITION
[J].
SAKAMOTO, Y
论文数:
0
引用数:
0
h-index:
0
机构:
INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN
INST PHYS & CHEM RES,WAKO,SAITAMA 351,JAPAN
SAKAMOTO, Y
.
JAPANESE JOURNAL OF APPLIED PHYSICS,
1977,
16
(11)
:1993
-1998
[22]
HIGH-CURRENT ION IMPLANTER USING A MICROWAVE ION-SOURCE
[J].
SAKUDO, N
论文数:
0
引用数:
0
h-index:
0
SAKUDO, N
;
TOKIGUCHI, K
论文数:
0
引用数:
0
h-index:
0
TOKIGUCHI, K
;
KOIKE, H
论文数:
0
引用数:
0
h-index:
0
KOIKE, H
;
KANOMATA, I
论文数:
0
引用数:
0
h-index:
0
KANOMATA, I
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
1983,
54
(06)
:681
-684
[23]
MICROWAVE ION-SOURCE FOR HIGH-CURRENT IMPLANTER
[J].
SAKUDO, N
论文数:
0
引用数:
0
h-index:
0
SAKUDO, N
;
TOKIGUCHI, K
论文数:
0
引用数:
0
h-index:
0
TOKIGUCHI, K
;
KOIKE, H
论文数:
0
引用数:
0
h-index:
0
KOIKE, H
;
KANOMATA, I
论文数:
0
引用数:
0
h-index:
0
KANOMATA, I
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
1978,
49
(07)
:940
-943
[24]
MICROWAVE ION-SOURCE
[J].
SAKUDO, N
论文数:
0
引用数:
0
h-index:
0
机构:
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
SAKUDO, N
;
TOKIGUCHI, K
论文数:
0
引用数:
0
h-index:
0
机构:
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
TOKIGUCHI, K
;
KOIKE, H
论文数:
0
引用数:
0
h-index:
0
机构:
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
KOIKE, H
;
KANOMATA, I
论文数:
0
引用数:
0
h-index:
0
机构:
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO,JAPAN
KANOMATA, I
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
1977,
48
(07)
:762
-766
[25]
BEAM EXTRACTION EXPERIMENTS FROM MICROWAVE ION SOURCES
[J].
TOKIGUCHI, K
论文数:
0
引用数:
0
h-index:
0
TOKIGUCHI, K
;
SAKUDO, N
论文数:
0
引用数:
0
h-index:
0
SAKUDO, N
;
KOIKE, H
论文数:
0
引用数:
0
h-index:
0
KOIKE, H
.
REVIEW OF SCIENTIFIC INSTRUMENTS,
1986,
57
(08)
:1526
-1530
[26]
VERY HIGH-CURRENT ECR ION-SOURCE FOR AN OXYGEN ION IMPLANTER
[J].
TORII, Y
论文数:
0
引用数:
0
h-index:
0
TORII, Y
;
SHIMADA, M
论文数:
0
引用数:
0
h-index:
0
SHIMADA, M
;
WATANABE, I
论文数:
0
引用数:
0
h-index:
0
WATANABE, I
.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
1987,
21
(2-4)
:178
-181
[27]
TRAVELPIECE AW, 1959, J APPL PHYS, V30, P1784
[28]
MICROWAVE-ABSORPTION PLASMA BELOW ELECTRON-CYCLOTRON FREQUENCY
[J].
TULLE, PA
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MONTREAL,DEPT PHYS,CP6128,MONTREAL,QUEBEC,CANADA
UNIV MONTREAL,DEPT PHYS,CP6128,MONTREAL,QUEBEC,CANADA
TULLE, PA
.
PLASMA PHYSICS AND CONTROLLED FUSION,
1974,
16
(10)
:933
-945
←
1
2
3
→