OXIDATION-INDUCED STRESS IN A LOCOS STRUCTURE

被引：20

作者：

ISOMAE, S

YAMAMOTO, S

AOKI, S

YAJIMA, A

机构：

来源：

IEEE ELECTRON DEVICE LETTERS | 1986年 / 7卷 / 06期

关键词：

D O I：

10.1109/EDL.1986.26403

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：368 / 370

页数：3

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