LOW-RESISTANCE NONSPIKING OHMIC CONTACT FOR ALGAAS GAAS HIGH ELECTRON-MOBILITY TRANSISTORS USING THE GE/PD SCHEME

被引：55

作者：

WANG, LC ^{[1
]}

LAU, SS ^{[1
]}

HSIEH, EK ^{[1
]}

VELEBIR, JR ^{[1
]}

机构：

[1] TRW,ELECTR SYST GRP,CTR MICROWAVE & MILLIMETER WAVE TECHNOL,REDONDO BEACH,CA 90278

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 26期

关键词：

D O I：

10.1063/1.101032

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2677 / 2679

页数：3

共 9 条

[1] ALLOYED OHMIC CONTACTS TO GAAS
BRASLAU, N
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03): : 803 - 807
[2] EXTREMELY LOW CONTACT RESISTANCES FOR ALGAAS/GAAS MODULATION-DOPED FIELD-EFFECT TRANSISTOR STRUCTURES
KETTERSON, A
PONSE, F
HENDERSON, T
KLEM, J
MORKOC, H
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (06) : 2305 - 2307
[3] HEMT WITH NONALLOYED OHMIC CONTACTS USING N+-INGAAS CAP LAYER
KURODA, S
HARADA, N
KATAKAMI, T
MIMURA, T
[J]. IEEE ELECTRON DEVICE LETTERS, 1987, 8 (09) : 389 - 391
[4] STRUCTURE AND LATERAL DIFFUSION OF OHMIC CONTACTS IN ALGAAS/GAAS HIGH ELECTRON-MOBILITY TRANSISTORS AND GAAS DEVICES
LANGER, DW
EZIS, A
RAI, AK
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (04): : 1030 - 1032
[5] PARASITIC SOURCE AND DRAIN RESISTANCE IN HIGH-ELECTRON-MOBILITY TRANSISTORS
LEE, SJ
CROWELL, CR
[J]. SOLID-STATE ELECTRONICS, 1985, 28 (07) : 659 - 668
[6] NONALLOYED OHMIC CONTACTS TO N-GAAS BY SOLID-PHASE EPITAXY OF GE
MARSHALL, ED
ZHANG, B
WANG, LC
JIAO, PF
CHEN, WX
SAWADA, T
LAU, SS
KAVANAGH, KL
KUECH, TF
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) : 942 - 947
[7] SOLID-PHASE REGROWTH OF COMPOUND SEMICONDUCTORS BY REACTION-DRIVEN DECOMPOSITION OF INTERMEDIATE PHASES
SANDS, T
MARSHALL, ED
WANG, LC
[J]. JOURNAL OF MATERIALS RESEARCH, 1988, 3 (05) : 914 - 921
[8] AN INVESTIGATION OF A NONSPIKING OHMIC CONTACT TO N-GAAS USING THE SI/PD SYSTEM
WANG, LC
ZHANG, B
FANG, F
MARSHALL, ED
LAU, SS
SANDS, T
[J]. JOURNAL OF MATERIALS RESEARCH, 1988, 3 (05) : 922 - 930
[9] THE TEMPERATURE-DEPENDENCE OF CONTACT RESISTIVITY OF THE GE PD AND THE SI PD NONALLOYED CONTACT SCHEME ON N-GAAS
YU, LS
WANG, LC
MARSHALL, ED
LAU, SS
KUECH, TF
[J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (04) : 1621 - 1625

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